ISO 6 Cleanroom Facility
Purpose-built for optical, laser, and precision subassembly work — the controlled environment that legacy KLA semiconductor equipment demands.
Inside the Cleanroom
Modular acrylic wall system, epoxy floor, 12 ceiling-mounted HEPA fan filter units, and positive pressure maintained above ambient — the controlled environment where refurbishment and validation work is performed.
ACS Certificate of Compliance
The physical certificate is posted on the cleanroom door. The full test report — with particle counts across 10 measurement locations — is available to review or download below.
Certificate of Compliance posted on the cleanroom door — American Cleanroom Systems, NIST-Traceable instruments.
What ISO Class 6 means in practice
ISO Class 6 permits a maximum of 35,200 particles (≥0.5 µm) per cubic meter at rest. This controlled environment supports contamination-sensitive work involving legacy KLA optical subassemblies, laser paths, detectors, and precision components where particle control is important to handling, service, and validation.
What the Cleanroom Enables
The cleanroom isn't a credential — it's a prerequisite for the work. Legacy KLA systems fail when environmental contamination enters subassemblies that were designed for fab-floor cleanliness standards.
Optical Component Handling
Laser optics, beam splitters, and sensitive detector assemblies serviced in a particle-controlled environment to prevent contamination-induced measurement drift.
Laser Subassembly Work
Class 3B laser systems serviced under controlled conditions with dedicated safety interlocks — the same hazard class as the KLA systems we support.
Refurbishment & Rebuild
Full system refurbishment requiring clean conditions — optics replacement, sensor calibration, and final performance validation — all performed in-spec.
Pre-Ship Validation
Refurbished and repaired systems validated in the cleanroom prior to shipment, matching the environmental conditions of your fab floor.
Irvine, California
1360 Reynolds Ave, Suite 102
Irvine, CA 92614
Equipment accepted for refurbishment, evaluation, and component-level repair. Contact engineering to discuss logistics, scope, and timeline before shipping.